When the preliminary transaction memorandum was signed in April, it was decided to pay $6.4 billion and 9.2 trillion won, down $1.65 billion and 2.3 trillion won.
The decrease in subsidies from the original plan comes after the government reduced its investment by 7.5% to $37 billion from its initial plan to invest more than $40 billion.
In addition, the sharp drop in subsidy payments is likely to have been attributed to the imminent inauguration of Donald Trump, who is critical of subsidy policies.
Commerce Secretary Gina Lermondo said the support for Samsung makes the U.S. the only country where all five of the world's top state-of-the-art semiconductor manufacturers have entered.
It also said it would ensure a stable domestic supply of state-of-the-art semiconductors vital to artificial intelligence and national security, while creating tens of thousands of jobs.
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